Electrical Resistivity Testing

Electrical resistivity is measured using the Tegam Model 1750 Microohmmeter. Configurations appropriate for a wide variety of sample geometries are used, including standard Kelvin 4-point probe connections for bulk bar-shaped samples, a collinear 4-point probe for thin films, wafers, and flat arbitrarily-shaped samples. Measurements have been made in the temperature range from 88 K to 296 K (-185 °C to 23 °C), and a furnace allows measurements up to 773 K (500 °C).

Surface resistance (R_s) can be measured in the range of 2 mΩ ≤ R_s ≤ 20 MΩ.

Volume resistivity (ρ_v) can be measured in the range of 10^-6 Ω·cm ≤ ρ_v ≤ 10⁹ Ω·cm.

Electrical Resistivity ASTM Standards

List of ASTM standards by which PMIC performs Electrical Resistivity testing.

ASTM Standard	Name
D257	Standard Test Methods for DC Resistance or Conductance of Insulating Materials
B193	Standard Test Method for Resistivity of Electrical Conductor Materials